Plasma diagnostic by optical emission spectroscopy on reactive magnetron sputtering plasma –A Brief Introduction

Synthesis and characterization of La2NiO4+δ coatings deposited by reactive magnetron sputtering using plasma emission monitoring

UV- and VIS Filter Coatings by Plasma Assisted Reactive Magnetron Sputtering (PARMS)

The advantage of PARMS for the manufacturing of high performance low loss coatings is demonstrated with UVand VIS band pass filter based on HfO2 respectively Nb2O5 and SiO2.

Decorative Titanium Nitride Colored Coatings on Bell-Metal by Reactive Cylindrical Magnetron Sputtering

The transition metal nitrides like titanium nitride exhibit very interesting color variation properties depending on the different plasma deposition conditions using cylindrical magnetron sputtering method. It is found in this deposition study that nitrogen partial pressure in the reactive gas discharge environment plays a significant role on the color variation of the film coatings on bell-met...

Study of Plasma System by OES (Optical Emission Spectroscopy)

Low-temperature and low-pressure plasma was investigated by OES (optical emission spectroscopy) in the range 200–1100 nm. For displaying measured emission spectra and identification of spectrum lines the software Spectrum Analyzer was used. Two modes of glow discharge present in the DC cylindrical magnetron apparatus which were previously researched by a mass spectrometer were studied by OES. T...

Plasma properties in high power impulse magnetron sputtering

.....................................................................................................I PREFACE.......................................................................................................III PAPERS INCLUDED IN THE THESIS ........................................................... V RELATED PUBLICATIONS NOT INCLUDED IN THE THESIS.................... VI ACKNOWLEDGEMENTS ...